Invention Grant
- Patent Title: Target supply unit
- Patent Title (中): 目标供应单位
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Application No.: US13401389Application Date: 2012-02-21
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Publication No.: US08742378B2Publication Date: 2014-06-03
- Inventor: Hidenobu Kameda , Hakaru Mizoguchi
- Applicant: Hidenobu Kameda , Hakaru Mizoguchi
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: McDermott Will & Emery LLP
- Priority: JP2011-060903 20110318
- Main IPC: H05G2/00
- IPC: H05G2/00
Abstract:
A target supply unit may include: a reservoir for storing a target material; a heater provided inside the reservoir for heating the target material stored in the reservoir; a heater power supply for supplying current to the heater; and a target outlet for outputting the target material stored inside the reservoir.
Public/Granted literature
- US20120236273A1 TARGET SUPPLY UNIT Public/Granted day:2012-09-20
Information query
