Invention Grant
- Patent Title: Window unit, window device, laser apparatus, and extreme ultraviolet light generation system
- Patent Title (中): 窗单元，窗装置，激光装置和极紫外光发生系统
-
Application No.: US13636038Application Date: 2011-07-05
-
Publication No.: US08742379B2Publication Date: 2014-06-03
- Inventor: Hidenobu Kameda , Masato Moriya , Osamu Wakabayashi
- Applicant: Hidenobu Kameda , Masato Moriya , Osamu Wakabayashi
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-191466 20100827; JP2011-075374 20110330
- International Application: PCT/JP2011/065744 WO 20110705
- International Announcement: WO2012/026228 WO 20120301
- Main IPC: H01S3/04
- IPC: H01S3/04
Abstract:
A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.
Public/Granted literature
- US20130020499A1 WINDOW UNIT, WINDOW DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM Public/Granted day:2013-01-24
Information query
