Invention Grant
- Patent Title: Thin film transistor and display device
- Patent Title (中): 薄膜晶体管和显示装置
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Application No.: US13888878Application Date: 2013-05-07
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Publication No.: US08742418B2Publication Date: 2014-06-03
- Inventor: Narihiro Morosawa , Yasuhiro Terai , Toshiaki Arai
- Applicant: Sony Corporation
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Dentons US LLP
- Priority: JP2008-261831 20081008; JP2009-107732 20090427
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
A thin film transistor comprising: a substrate; a gate electrode on the substrate; a gate insulation film on the gate electrode; an oxide semiconductor layer on the gate insulation film; a channel protection film on the oxide semiconductor layer; source and drain electrodes on the channel protection film; and a passivation film on the source and drain electrodes, wherein, (a) each of the gate insulation film, and passivation film comprises a laminated structure and includes a first layer made of aluminum oxide and a second layer made of an insulation material including silicon, and (b) the passivation film covers edges of the oxide semiconductor layer. The transistor is capable of suppressing desorption of oxygen and from the oxide semiconductor layer and reducing the time for film formation thereof.
Public/Granted literature
- US20130240878A1 THIN FILM TRANSISTOR AND DISPLAY DEVICE Public/Granted day:2013-09-19
Information query
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