Invention Grant
- Patent Title: Semiconductor device and method of providing Z-interconnect conductive pillars with inner polymer core
- Patent Title (中): 提供Z型互连导电柱与内聚合物芯的半导体器件和方法
-
Application No.: US13405094Application Date: 2012-02-24
-
Publication No.: US08742579B2Publication Date: 2014-06-03
- Inventor: Reza A. Pagaila , Byung Tai Do , Shuangwu Huang
- Applicant: Reza A. Pagaila , Byung Tai Do , Shuangwu Huang
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins & Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A semiconductor device is made by providing a sacrificial substrate and depositing an adhesive layer over the sacrificial substrate. A first conductive layer is formed over the adhesive layer. A polymer pillar is formed over the first conductive layer. A second conductive layer is formed over the polymer pillar to create a conductive pillar with inner polymer core. A semiconductor die or component is mounted over the substrate. An encapsulant is deposited over the semiconductor die or component and around the conductive pillar. A first interconnect structure is formed over a first side of the encapsulant. The first interconnect structure is electrically connected to the conductive pillar. The sacrificial substrate and adhesive layers are removed. A second interconnect structure is formed over a second side of the encapsulant opposite the first interconnect structure. The second interconnect structure is electrically connected to the conductive pillar.
Public/Granted literature
- US20120153472A1 Semiconductor Device and Method of Providing Z-Interconnect Conductive Pillars with Inner Polymer Core Public/Granted day:2012-06-21
Information query
IPC分类: