Invention Grant
- Patent Title: Semiconductor device and method for manufacturing same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US13416419Application Date: 2012-03-09
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Publication No.: US08742596B2Publication Date: 2014-06-03
- Inventor: Takaaki Hirano
- Applicant: Takaaki Hirano
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Rader, Fishman & Grauer PLLC
- Priority: JP2011-065493 20110324; JP2011-065494 20110324
- Main IPC: H01L23/488
- IPC: H01L23/488 ; H01L21/50

Abstract:
Disclosed herein is a semiconductor device including: a first laminate having a wiring layer formed on a substrate; a second laminate having a wiring layer formed on a substrate, a principal surface of the second laminate being bonded to a principal surface of the first laminate; a functional element disposed in at least one of the first laminate and the second laminate; and an air gap penetrating an interface between the first laminate and the second laminate, the air gap being disposed on an outside of a circuit formation region including the functional element in at least one of the first laminate and the second laminate as viewed from a direction perpendicular to the principal surfaces of the first laminate and the second laminate.
Public/Granted literature
- US20120241981A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2012-09-27
Information query
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