Invention Grant
US08742645B2 Surface acoustic wave sensor system 有权
表面声波传感器系统

Surface acoustic wave sensor system
Abstract:
A surface acoustic wave sensor system includes a base substrate, a piezoelectric substrate disposed on the base substrate, inter-digital transducer (IDT) electrodes disposed along a longitudinal direction on the piezoelectric substrate, each IDT electrode including an input inter-digital transducer and an output inter-digital transducer paired with and facing the input inter-digital transducer, each pair of input and output IDTs forming a surface acoustic wave unit sensor with the piezoelectric substrate, and connection electrodes disposed in the base substrate and electrically connected to the surface acoustic wave unit sensors.
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