Invention Grant
- Patent Title: Surface acoustic wave sensor system
- Patent Title (中): 表面声波传感器系统
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Application No.: US12705599Application Date: 2010-02-13
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Publication No.: US08742645B2Publication Date: 2014-06-03
- Inventor: Hun Joo Lee , Soo Suk Lee , Yeol Ho Lee
- Applicant: Hun Joo Lee , Soo Suk Lee , Yeol Ho Lee
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: KR10-2009-0089632 20090922
- Main IPC: H01L41/04
- IPC: H01L41/04

Abstract:
A surface acoustic wave sensor system includes a base substrate, a piezoelectric substrate disposed on the base substrate, inter-digital transducer (IDT) electrodes disposed along a longitudinal direction on the piezoelectric substrate, each IDT electrode including an input inter-digital transducer and an output inter-digital transducer paired with and facing the input inter-digital transducer, each pair of input and output IDTs forming a surface acoustic wave unit sensor with the piezoelectric substrate, and connection electrodes disposed in the base substrate and electrically connected to the surface acoustic wave unit sensors.
Public/Granted literature
- US20110068656A1 SURFACE ACOUSTIC WAVE SENSOR SYSTEM Public/Granted day:2011-03-24
Information query
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