Invention Grant
- Patent Title: Piezoelectric/electrostrictive element
- Patent Title (中): 压电/电致伸缩元件
-
Application No.: US12032128Application Date: 2008-02-15
-
Publication No.: US08742650B2Publication Date: 2014-06-03
- Inventor: Hideki Shimizu , Takashi Ebigase
- Applicant: Hideki Shimizu , Takashi Ebigase
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H01L41/187 ; H01L41/047

Abstract:
In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (Y2O3) and cerium oxide (CeO2) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.
Public/Granted literature
- US20080213575A1 PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT Public/Granted day:2008-09-04
Information query
IPC分类: