Temperature-independent delay elements and oscillators are disclosed. In one design, an apparatus includes at least one delay element, a bias circuit, and a current source. The delay element(s) receive a charging current from the current source and provide a delay that is dependent on the charging current. Each delay element may be a current-starved delay element. The delay element(s) may be coupled in series to implement a delay line or in a loop to implement an oscillator. The bias circuit controls generation of the charging current based on a function of at least one parameter (e.g., a switching threshold voltage) of the at least one delay element in order to reduce variations in delay with temperature. The current source provides the charging current for the delay element(s) and is controlled by the bias circuit.