Invention Grant
- Patent Title: Double through silicon via structure
- Patent Title (中): 双通硅结构
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Application No.: US13714923Application Date: 2012-12-14
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Publication No.: US08742839B2Publication Date: 2014-06-03
- Inventor: Hsiu-Chuan Shih , Cheng-Wen Wu
- Applicant: National Tsing Hua University
- Applicant Address: TW Hsinchu
- Assignee: National Tsing Hua University
- Current Assignee: National Tsing Hua University
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW101131944A 20120831
- Main IPC: H01L25/00
- IPC: H01L25/00 ; H01L23/50

Abstract:
This invention discloses a double Through Silicon Via (TSV) structure, including a first die unit, a first signal path, a second signal path, a receiving unit and a second die unit. The first and the second signal paths respectively include a driving unit and a TSV unit. Each driving unit includes a first end, a second end and a third end. The invention divides the signal paths of the conventional double TSV into two different signal paths by two driving units and the receiving unit having OR gate or NOR gate, to avoid generating the problem of signal degradation from the TSV unit with short defect. The invention further disposes a first switch unit, a second switch unit, a first exchange unit, a second exchange unit, a first VDD keeper and a second VDD keeper, to avoid generating the problems of open defect and leakage current.
Public/Granted literature
- US20140062586A1 DOUBLE THROUGH SILICON VIA STRUCTURE Public/Granted day:2014-03-06
Information query
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