Invention Grant
- Patent Title: Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object
- Patent Title (中): 电缆连接，控制系统和减少振动从第一物体传递到第二物体的方法
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Application No.: US12470773Application Date: 2009-05-22
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Publication No.: US08743344B2Publication Date: 2014-06-03
- Inventor: Hans Butler , Martinus Van Duijnhoven , Johan Hendrik Geerke , Joost De Pee , Cornelius Adrianus Lambertus De Hoon
- Applicant: Hans Butler , Martinus Van Duijnhoven , Johan Hendrik Geerke , Joost De Pee , Cornelius Adrianus Lambertus De Hoon
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G03B27/32
- IPC: G03B27/32
Abstract:
A cable connection between a first object and a second object includes a cable bundle of one or more cables having a certain length. One end of the cable bundle is fixed to the first object and another end of the bundle is fixed to the second object. A cable bundle holder configured to hold the cable bundle at a certain location along the length of the cable bundle, and a control system configured to control the position of the cable bundle holder with respect to the second object are presented. A control system for cable connection, and a method of reducing the transfer of vibrations from a first object to a second object via a cable connection are presented.
Public/Granted literature
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