Invention Grant
- Patent Title: Interferometer including elements that reflect beams moved in parallel in a direction substantially perpendicular to a substrate by reflection
- Patent Title (中): 干涉仪包括反射沿基本上垂直于衬底的方向平行移动的光束的元件
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Application No.: US13348954Application Date: 2012-01-12
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Publication No.: US08743370B2Publication Date: 2014-06-03
- Inventor: Kentaro Osawa , Hideharu Mikami
- Applicant: Kentaro Osawa , Hideharu Mikami
- Applicant Address: JP Kanagawa
- Assignee: Oclaro Japan, Inc.
- Current Assignee: Oclaro Japan, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Mattingly & Malur, PC
- Priority: JP2011-007331 20110117
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G02F2/00 ; H04B10/08 ; H04B17/00

Abstract:
A delay interferometer includes a half beam splitter and two pentagonal prisms disposed on a substrate. The half beam splitter branches light to be measured which travels substantially in parallel with the substrate into two branched light beams. The pentagonal prisms respectively reflect the respective branched light beams such that the optical axes of the branched light beams are moved in parallel in a direction substantially perpendicular to the substrate by reflection. The half beam splitter combines the branched light beams reflected by the pentagonal prisms to generate interference light beams.
Public/Granted literature
- US20120182559A1 INTERFEROMETER, DEMODULATOR AND RECEIVER-TRANSMITTER Public/Granted day:2012-07-19
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