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US08743370B2 Interferometer including elements that reflect beams moved in parallel in a direction substantially perpendicular to a substrate by reflection 有权
干涉仪包括反射沿基本上垂直于衬底的方向平行移动的光束的元件

Interferometer including elements that reflect beams moved in parallel in a direction substantially perpendicular to a substrate by reflection
Abstract:
A delay interferometer includes a half beam splitter and two pentagonal prisms disposed on a substrate. The half beam splitter branches light to be measured which travels substantially in parallel with the substrate into two branched light beams. The pentagonal prisms respectively reflect the respective branched light beams such that the optical axes of the branched light beams are moved in parallel in a direction substantially perpendicular to the substrate by reflection. The half beam splitter combines the branched light beams reflected by the pentagonal prisms to generate interference light beams.
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