Invention Grant
US08743449B2 Method and apparatus for providing high-fill-factor micromirror/micromirror arrays with surface mounting capability
有权
用于提供具有表面安装能力的高填充因子微镜/微镜阵列的方法和装置
- Patent Title: Method and apparatus for providing high-fill-factor micromirror/micromirror arrays with surface mounting capability
- Patent Title (中): 用于提供具有表面安装能力的高填充因子微镜/微镜阵列的方法和装置
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Application No.: US13148019Application Date: 2010-06-01
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Publication No.: US08743449B2Publication Date: 2014-06-03
- Inventor: Huikai Xie , Kemiao Jia
- Applicant: Huikai Xie , Kemiao Jia
- Agency: Saliwanchik, Lloyd & Eisenschenk
- International Application: PCT/US2010/036925 WO 20100601
- International Announcement: WO2010/138968 WO 20101202
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08 ; B29D11/00

Abstract:
Embodiments of the subject invention relate to micromirror devices and methods of fabricating a micromirror/micromirror array. According to an embodiment, micromirrors can be fabricated from a semiconductor substrate where after forming actuators and bonding pads on a front side of the semiconductor substrate, the device is flipped over to have a portion of the back side of the substrate removed and formed to become the mirror plate surface. The subject micromirrors can allow further miniaturization of endoscopes and other optical applications without sacrificing the optical aperture through their surface mounting capabilities.
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