Invention Grant
US08744046B2 Method and apparatus of precisely measuring intensity profile of X-ray nanobeam
有权
精确测量X射线纳米粒子强度分布的方法和装置
- Patent Title: Method and apparatus of precisely measuring intensity profile of X-ray nanobeam
- Patent Title (中): 精确测量X射线纳米粒子强度分布的方法和装置
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Application No.: US13203095Application Date: 2009-03-19
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Publication No.: US08744046B2Publication Date: 2014-06-03
- Inventor: Kazuto Yamauchi , Hidekazu Mimura , Hiromi Okada
- Applicant: Kazuto Yamauchi , Hidekazu Mimura , Hiromi Okada
- Applicant Address: JP Kobe-shi JP Suita-shi
- Assignee: JTEC Corporation,Osaka University
- Current Assignee: JTEC Corporation,Osaka University
- Current Assignee Address: JP Kobe-shi JP Suita-shi
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2009-045688 20090227
- International Application: PCT/JP2009/055474 WO 20090319
- International Announcement: WO2010/097968 WO 20100902
- Main IPC: G01N23/20
- IPC: G01N23/20

Abstract:
Provided are a method and an apparatus of precisely measuring the intensity profile of an x-ray nanobeam, which can measure x-rays having different wavelengths with one knife edge and can perform optimal measurements corresponding to the depth of focus of an x-ray beam and the conditions of other measurement devices, using a dark field measurement method which enables precise measurements of the profile of an x-ray beam using a knife edge and using diffracted and transmitted x-rays. The knife edge (4) is formed of a heavy metal which advances the phase of an x-ray passing therethrough and is fabricated in such a manner that the thickness may change in the longitudinal direction continuously or in a stepwise fashion. The knife edge (4) is so set that an x-ray beam may traverse the knife edge (4) at such a thickness position as to achieve a phase shift in a range wherein a transmitted x-ray and a diffracted x-ray diffracted at the end of the knife edge may reinforce each other, and a superposed x-ray of the diffracted x-ray and the transmitted x-ray is measured by an x-ray detector.
Public/Granted literature
- US20110305317A1 METHOD AND APPARATUS OF PRECISELY MEASURING INTENSITY PROFILE OF X-RAY NANOBEAM Public/Granted day:2011-12-15
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