Invention Grant
US08744624B1 Substrate alignment system 有权
基板对准系统

Substrate alignment system
Abstract:
A substrate loading system, having a vision system adapted to view a substrate and provide position signals indicative of substrate position. A controller receives the position signals from the vision system, determines the substrate position, and sends transport signals to a robot arm. The robot arm engages the substrate in a beginning location and a beginning position and transports the substrate to a desired location and a desired position, based at least in part on the transport signals received from the controller.
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