Invention Grant
- Patent Title: Substrate alignment system
- Patent Title (中): 基板对准系统
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Application No.: US11382721Application Date: 2006-05-11
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Publication No.: US08744624B1Publication Date: 2014-06-03
- Inventor: Farro Kaveh , Martin P. Aalund
- Applicant: Farro Kaveh , Martin P. Aalund
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A substrate loading system, having a vision system adapted to view a substrate and provide position signals indicative of substrate position. A controller receives the position signals from the vision system, determines the substrate position, and sends transport signals to a robot arm. The robot arm engages the substrate in a beginning location and a beginning position and transports the substrate to a desired location and a desired position, based at least in part on the transport signals received from the controller.
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