Invention Grant
- Patent Title: Force feedback leveling of tip arrays for nanolithography
- Patent Title (中): 用于纳米光刻的尖端阵列的力反馈调平
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Application No.: US12960439Application Date: 2010-12-03
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Publication No.: US08745761B2Publication Date: 2014-06-03
- Inventor: Chad A. Mirkin , Xing Liao , Adam B. Braunschweig
- Applicant: Chad A. Mirkin , Xing Liao , Adam B. Braunschweig
- Applicant Address: US IL Evanston
- Assignee: Northwestern University
- Current Assignee: Northwestern University
- Current Assignee Address: US IL Evanston
- Agency: Marshall, Gerstein & Borun LLP
- Main IPC: G01L1/06
- IPC: G01L1/06 ; G01N13/16 ; B05D3/12

Abstract:
A method of leveling a polymer pen array includes contacting a pen array with a surface and measuring a total force exerted on the surface by the pen array, the pen array being disposed at a first angle with respect to a first axis of the surface and a second angle with respect to a second axis of the surface; tilting one or both of the pen array and the surface to vary the first and second angles of the pen array with respect to the surface; measuring the total force exerted by the tilted pen array on the surface; and repeating the tilting and measuring steps until a global maximum of the total force exerted on the surface by the pen array is measured, thereby determining first and second angles which correspond to a leveled position of the pen array with respect to the surface.
Public/Granted literature
- US20110165329A1 Force Feedback Leveling of Tip Arrays for Nanolithography Public/Granted day:2011-07-07
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