Invention Grant
US08746039B2 Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection 有权
具有压电层,处理部分和电阻加热器的悬臂式探头及其化学检测方法

Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection
Abstract:
The invention provides a liquid cell for an atomic force microscope. The liquid cell includes a liquid cell housing with an internal cavity to contain a fluid, a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell, a cantilevered probe coupled to the liquid cell housing, and a piezoelectric drive element disposed on the cantilevered probe. The cantilevered probe is actuated when a drive voltage is applied to the piezoelectric drive element through at least one of the conductive feedthroughs. A method of imaging an object in a liquid medium and a method of sensing a target species with the liquid cell are also disclosed.
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