Invention Grant
US08746284B2 Apparatus and method for multiple symmetrical divisional gas distribution 有权
多对称分布气体分布的装置和方法

  • Patent Title: Apparatus and method for multiple symmetrical divisional gas distribution
  • Patent Title (中): 多对称分布气体分布的装置和方法
  • Application No.: US13105225
    Application Date: 2011-05-11
  • Publication No.: US08746284B2
    Publication Date: 2014-06-10
  • Inventor: Jay DeDontney
  • Applicant: Jay DeDontney
  • Applicant Address: US CA San Jose
  • Assignee: Intermolecular, Inc.
  • Current Assignee: Intermolecular, Inc.
  • Current Assignee Address: US CA San Jose
  • Main IPC: F16K11/20
  • IPC: F16K11/20 C23C16/455
Apparatus and method for multiple symmetrical divisional gas distribution
Abstract:
An apparatus and method for multiple symmetrical divisional gas distribution providing a mounting plate, a plurality of manifolds coupled to the mounting plate, a center purge block coupled to the mounting plate and the plurality of manifolds, a plurality of reactant distribution blocks, wherein each reactant distribution block is stacked atop each other to form a reactant distribution block stack, wherein the reactant distribution block stack sits atop the center purge block, a coupling mechanism to secure the plurality of reactant distribution blocks of the reactant distribution block stack together; and a top cap coupled to the reactant distribution block stack and the coupling mechanism.
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