Invention Grant
- Patent Title: Apparatus and method for multiple symmetrical divisional gas distribution
- Patent Title (中): 多对称分布气体分布的装置和方法
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Application No.: US13105225Application Date: 2011-05-11
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Publication No.: US08746284B2Publication Date: 2014-06-10
- Inventor: Jay DeDontney
- Applicant: Jay DeDontney
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: F16K11/20
- IPC: F16K11/20 ; C23C16/455

Abstract:
An apparatus and method for multiple symmetrical divisional gas distribution providing a mounting plate, a plurality of manifolds coupled to the mounting plate, a center purge block coupled to the mounting plate and the plurality of manifolds, a plurality of reactant distribution blocks, wherein each reactant distribution block is stacked atop each other to form a reactant distribution block stack, wherein the reactant distribution block stack sits atop the center purge block, a coupling mechanism to secure the plurality of reactant distribution blocks of the reactant distribution block stack together; and a top cap coupled to the reactant distribution block stack and the coupling mechanism.
Public/Granted literature
- US20120289057A1 APPARATUS AND METHOD FOR MULTIPLE SYMMETRICAL DIVISIONAL GAS DISTRIBUTION Public/Granted day:2012-11-15
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