Invention Grant
- Patent Title: Method for manufacturing piezoelectric element, piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
- Patent Title (中): 制造压电元件，压电元件，液体喷射头和液体喷射装置的方法
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Application No.: US13429103Application Date: 2012-03-23
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Publication No.: US08746855B2Publication Date: 2014-06-10
- Inventor: Masahisa Nawano
- Applicant: Masahisa Nawano
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2011-066812 20110324
- Main IPC: B41J2/045
- IPC: B41J2/045
Abstract:
A piezoelectric element is manufactured in a method including forming an adhesion layer of zirconium above a zirconium oxide insulating film, forming a first electrode above the adhesion layer, forming a piezoelectric layer of a complex oxide containing bismuth above the first electrode, and forming a second electrode above the piezoelectric layer.
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