Invention Grant
US08746856B2 Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus 有权
压电元件,液体喷射头和液体喷射装置

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
Abstract:
A piezoelectric element comprises a first electrode including platinum, a piezoelectric layer disposed above the first electrode, made of a complex oxide having a perovskite structure containing at least bismuth, and a second electrode disposed above the piezoelectric layer. An oxide containing bismuth and platinum is disposed at the interface of the piezoelectric layer with the first electrode.
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