Invention Grant
US08747627B2 Method and device for reversing the feeding of sputter coating systems in clean rooms 有权
用于反向在洁净室中进行溅射镀膜系统的方法和装置

  • Patent Title: Method and device for reversing the feeding of sputter coating systems in clean rooms
  • Patent Title (中): 用于反向在洁净室中进行溅射镀膜系统的方法和装置
  • Application No.: US13131167
    Application Date: 2009-11-26
  • Publication No.: US08747627B2
    Publication Date: 2014-06-10
  • Inventor: Roland Franz
  • Applicant: Roland Franz
  • Applicant Address: DE Asbach-Baeumenheim
  • Assignee: Grenzebach Maschinenbau GmbH
  • Current Assignee: Grenzebach Maschinenbau GmbH
  • Current Assignee Address: DE Asbach-Baeumenheim
  • Agency: Brinks Gilson & Lione
  • Priority: DE102008059794 20081201
  • International Application: PCT/DE2009/001680 WO 20091126
  • International Announcement: WO2010/063264 WO 20100610
  • Main IPC: C23C14/34
  • IPC: C23C14/34
Method and device for reversing the feeding of sputter coating systems in clean rooms
Abstract:
The invention relates to a method and to a device for reversing the feeding of a sputter coating system, particularly when coating a photovoltaic module, in clean rooms, having the following characteristics: a) a transport frame (11) for receiving a substrate wafer (19) of a photovoltaic module, b) a rotary device having means for mounting the transport frame (11), having means for rotating the transport frame (11), and having means for transporting the transport frame (11), c) means for precisely aligning the rotary device relative to the sputter coating system, d) a detection device (18) for checking a sputter process, and computer program having a program code for performing the process steps.
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