Invention Grant
US08747688B2 Glass disk processing method 失效
玻璃盘加工方法

Glass disk processing method
Abstract:
The present invention provides a method of easily chamfering and polishing an inner peripheral face and an outer peripheral face of a glass disk at low cost. By continuously supplying fresh etchants to an inner peripheral face and an outer peripheral face of a glass disk stacked body in which a plurality of glass disks are stacked, the inner and outer peripheral faces are polished.
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