Invention Grant
- Patent Title: Pre-treatment apparatus and method for improving adhesion of thin film
- Patent Title (中): 改善薄膜粘附性的预处理装置和方法
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Application No.: US13809206Application Date: 2011-07-08
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Publication No.: US08747946B2Publication Date: 2014-06-10
- Inventor: Kyung Hyun Ko , Hyuk Jun Lee
- Applicant: Kyung Hyun Ko , Hyuk Jun Lee
- Applicant Address: KR Gyeonggi-Do
- Assignee: Ajou University Industry Cooperation Foundation
- Current Assignee: Ajou University Industry Cooperation Foundation
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2010-0066419 20100709
- International Application: PCT/KR2011/005004 WO 20110708
- International Announcement: WO2012/005539 WO 20120112
- Main IPC: B05D1/12
- IPC: B05D1/12 ; C23C24/04
Abstract:
There is provided a pre-treatment method for improving an adhesion of a thin film which includes: preparing a base metal including a single metal or alloy; preparing a coating powder including powder of one or more single metals or an alloy thereof; forming a porous metal coating layer on a surface of the base metal, on which a thin film is to be deposited, by cold-spraying the coating powder and a process gas to the surface of the base metal; and depositing the thin film on the coating layer, wherein the thin film includes metal.
Public/Granted literature
- US20130115378A1 PRE-TREATMENT APPARATUS AND METHOD FOR IMPROVING ADHESION OF THIN FILM Public/Granted day:2013-05-09
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