Invention Grant
US08748074B2 Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom
有权
可自成像的成膜聚合物，其组合物和由其制成的装置和结构
- Patent Title: Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom
- Patent Title (中): 可自成像的成膜聚合物，其组合物和由其制成的装置和结构
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Application No.: US13303423Application Date: 2011-11-23
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Publication No.: US08748074B2Publication Date: 2014-06-10
- Inventor: Osamu Onishi , Haruo Ikeda , Larry F. Rhodes , Pramod Kandanarachchi
- Applicant: Osamu Onishi , Haruo Ikeda , Larry F. Rhodes , Pramod Kandanarachchi
- Applicant Address: US OH Brecksville JP Tokyo
- Assignee: Promerus, LLC,Sumitomo Bakelite Co., Ltd.
- Current Assignee: Promerus, LLC,Sumitomo Bakelite Co., Ltd.
- Current Assignee Address: US OH Brecksville JP Tokyo
- Agent Balaram Gupta; Michael W. Ferrell
- Main IPC: G03F7/023
- IPC: G03F7/023 ; G03F7/038
Abstract:
Polymers and compositions for forming self-imageable films encompassing such polymers that encompass norbornene-type repeating unit having at least one phenolic functionality and maleic anhydride-type repeating unit, which can be formulated to be either positive tone imaging or negative tone imaging. The films formed thereby are useful as self-imageable layers in the manufacture of microelectronic, such as semiconductor, and optoelectronic devices.
Public/Granted literature
- US20120129101A1 Self-Imageable Film Forming Polymer, Compositions Thereof and Devices and Structures Made Therefrom Public/Granted day:2012-05-24
Information query
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