Invention Grant
- Patent Title: Organic anti reflective layer composition
- Patent Title (中): 有机防反射层组成
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Application No.: US13652097Application Date: 2012-10-15
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Publication No.: US08748081B2Publication Date: 2014-06-10
- Inventor: Jin Han Lee , Shin Hyo Bae , Seung Hee Hong , Eun Hee Han
- Applicant: Korea Kumho Petrochemical Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: KR10-2011-0146127 20111229
- Main IPC: G03F7/11
- IPC: G03F7/11

Abstract:
Disclosed is an organic antireflective film composition which includes a monomer containing two or more thiol groups and a monomer containing two or more vinyl groups, as crosslinking agents. When the organic antireflective film composition is used, an antireflective film formed from the composition can be rapidly etched in an ultrafine pattern forming process, and the curing rate can be increased, while the etching rate is increased, without using an acid generator and a curing agent or by using the agents only in small amounts.
Public/Granted literature
- US20130171565A1 ORGANIC ANTI REFLECTIVE LAYER COMPOSITION Public/Granted day:2013-07-04
Information query
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