Invention Grant
- Patent Title: Nanoball solution coating method and applications thereof
- Patent Title (中): Nanoball溶液涂布方法及其应用
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Application No.: US13665215Application Date: 2012-10-31
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Publication No.: US08748221B2Publication Date: 2014-06-10
- Inventor: Hsin-Fei Meng , Hsiao-Wen Zan , Yen-Chu Chao , Kai-Ruei Wang , Yung-Hsuan Hsu
- Applicant: National Chiao Tung University
- Applicant Address: TW Hsinchu
- Assignee: National Chiao Tung University
- Current Assignee: National Chiao Tung University
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW101128412A 20120807
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/033 ; H01L51/00 ; B01D67/00
Abstract:
The present invention discloses a nanoball solution coating method and applications thereof. The method comprises steps: using a scraper to coat a nanoball solution on a substrate to attach a plurality of nanoballs on the substrate; flushing or flowing through the substrate with a heated volatile solution to suspend the nanoballs unattached to the substrate in the volatile solution; and using the scraper to scrape off the volatile solution carrying the suspended nanoballs, whereby is simplified the process to coat nanoballs. The method can be used to fabricate nanoporous films, organic vertical transistors, and large-area elements and favors mass production.
Public/Granted literature
- US20140045297A1 NANOBALL SOLUTION COATING METHOD AND APPLICATIONS THEREOF Public/Granted day:2014-02-13
Information query
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