Invention Grant
- Patent Title: Integrated circuit having silicide block resistor
- Patent Title (中): 具有硅化物阻抗电阻的集成电路
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Application No.: US13366903Application Date: 2012-02-06
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Publication No.: US08748256B2Publication Date: 2014-06-10
- Inventor: Song Zhao , Gregory Charles Baldwin , Shashank S. Ekbote , Youn Sung Choi
- Applicant: Song Zhao , Gregory Charles Baldwin , Shashank S. Ekbote , Youn Sung Choi
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
A method for forming an integrated circuit (IC) including a silicide block poly resistor (SIBLK poly resistor) includes forming a dielectric isolation region in a top semiconductor surface of a substrate. A polysilicon layer is formed including patterned resistor polysilicon on the dielectric isolation region and gate polysilicon on the top semiconductor surface. Implanting is performed using a first shared metal-oxide-semiconductor (MOS)/resistor polysilicon implant level for simultaneously implanting the patterned resistor polysilicon and gate polysilicon of a MOS transistor with at least a first dopant. Implanting is then performed using a second shared MOS/resistor polysilicon implant level for simultaneously implanting the patterned resistor polysilicon, gate polysilicon and source and drain regions of the MOS transistor with at least a second dopant. A metal silicide is formed on a first and second portion of a top surface of the patterned resistor polysilicon to form the SIBLK poly resistor.
Public/Granted literature
- US20130200466A1 INTEGRATED CIRCUIT HAVING SILICIDE BLOCK RESISTOR Public/Granted day:2013-08-08
Information query
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