Invention Grant
US08748280B2 Methods of fabricating fin structures 有权
翅片结构的制作方法

Methods of fabricating fin structures
Abstract:
There is provided fin methods for fabricating fin structures. More specifically, fin structures are formed in a substrate. The fin structures may include two fins separated by a channel, wherein the fins may be employed as fins of a field effect transistor. The fin structures are formed below the upper surface of the substrate, and may be formed without utilizing a photolithographic mask to etch the fins.
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