Invention Grant
US08748291B2 Method for strip testing of MEMS devices, testing strip of MEMS devices and MEMS device thereof
有权
MEMS器件的条带测试方法,MEMS器件的测试条和其MEMS器件
- Patent Title: Method for strip testing of MEMS devices, testing strip of MEMS devices and MEMS device thereof
- Patent Title (中): MEMS器件的条带测试方法,MEMS器件的测试条和其MEMS器件
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Application No.: US13629157Application Date: 2012-09-27
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Publication No.: US08748291B2Publication Date: 2014-06-10
- Inventor: Mark Anthony Azzopardi , Conrad Cachia , Stefano Pozzi
- Applicant: STMicroelectronics S.r.l. , STMicroelectronics Ltd (Malta)
- Applicant Address: IT Agrate Brianza MT Kirkop
- Assignee: STMicroelectronics S.r.l.,STMicroelectronics Ltd (Malta)
- Current Assignee: STMicroelectronics S.r.l.,STMicroelectronics Ltd (Malta)
- Current Assignee Address: IT Agrate Brianza MT Kirkop
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2011A0875 20110930
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46 ; H01L21/00 ; H01L21/44 ; H01L21/48 ; H01L21/50

Abstract:
A method for testing a strip of MEMS devices, the MEMS devices including at least a respective die of semiconductor material coupled to an internal surface of a common substrate and covered by a protection material; the method envisages: detecting electrical values generated by the MEMS devices in response to at least a testing stimulus; and, before the step of detecting, at least partially separating contiguous MEMS devices in the strip. The step of separating includes defining a separation trench between the contiguous MEMS devices, the separation trench extending through the whole thickness of the protection material and through a surface portion of the substrate, starting from the internal surface of the substrate.
Public/Granted literature
- US20130082258A1 METHOD FOR STRIP TESTING OF MEMS DEVICES, TESTING STRIP OF MEMS DEVICES AND MEMS DEVICE THEREOF Public/Granted day:2013-04-04
Information query
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