Invention Grant
- Patent Title: Compound semiconductor device and method for manufacturing the same
- Patent Title (中): 复合半导体器件及其制造方法
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Application No.: US13587051Application Date: 2012-08-16
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Publication No.: US08748861B2Publication Date: 2014-06-10
- Inventor: Atsushi Yamada
- Applicant: Atsushi Yamada
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/267

Abstract:
An AlGaN/GaN-HEMT has a structure including: compound semiconductor layers formed on a substrate; a gate electrode, a gate pad that has a current path formed between the gate electrode and itself, and a semiconductor layer that is spontaneously polarized and piezoelectrically polarized, which are formed on the compound semiconductor layer; and a gate electrode connection layer formed on the semiconductor layer, wherein the gate electrode connection layer and the gate electrode are electrically connected with each other. This structure which is relatively simple allows the AlGaN/GaN-HEMT to realize an intended normally-off operation without causing such inconveniences as increase in a sheet resistance, increase in an on-resistance, and increase in a leakage current.
Public/Granted literature
- US20120307534A1 COMPOUND SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-12-06
Information query
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