Invention Grant
- Patent Title: Semiconductor device with oxide semiconductor
- Patent Title (中): 具有氧化物半导体的半导体器件
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Application No.: US12949949Application Date: 2010-11-19
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Publication No.: US08748880B2Publication Date: 2014-06-10
- Inventor: Shunpei Yamazaki , Daisuke Kawae
- Applicant: Shunpei Yamazaki , Daisuke Kawae
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2009-265028 20091120
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/786

Abstract:
Provided is a semiconductor device for high power application including a novel semiconductor material with high productivity. Alternatively, provided is a semiconductor device having a novel structure in which the novel semiconductor material is used. Provided is a vertical transistor including a channel formation region formed using an oxide semiconductor which has a wider band gap than a silicon semiconductor and is an intrinsic semiconductor or a substantially intrinsic semiconductor with impurities that can serve as electron donors (donors) in the oxide semiconductor removed. The thickness of the oxide semiconductor is greater than or equal to 1 μm, preferably greater than 3 μm, more preferably greater than or equal to 10 μm, and end portions of one of electrodes that are in contact with the oxide semiconductor is placed inside end portions of the oxide semiconductor.
Public/Granted literature
- US20110121288A1 SEMICONDUCTOR DEVICE Public/Granted day:2011-05-26
Information query
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