Invention Grant
US08748991B2 Control of flatband voltages and threshold voltages in high-k metal gate stacks and structures for CMOS devices
有权
控制CMOS器件的高k金属栅极堆叠和结构中的平带电压和阈值电压
- Patent Title: Control of flatband voltages and threshold voltages in high-k metal gate stacks and structures for CMOS devices
- Patent Title (中): 控制CMOS器件的高k金属栅极堆叠和结构中的平带电压和阈值电压
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Application No.: US13550919Application Date: 2012-07-17
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Publication No.: US08748991B2Publication Date: 2014-06-10
- Inventor: Hemanth Jagannathan , Takashi Ando , Vijay Narayanan
- Applicant: Hemanth Jagannathan , Takashi Ando , Vijay Narayanan
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/092
- IPC: H01L27/092

Abstract:
A high-k metal gate stack and structures for CMOS devices and a method for forming the devices. The gate stack includes a high-k dielectric having a high dielectric constant greater than approximately 3.9, a germanium (Ge) material layer interfacing with the high-k dielectric, and a conductive electrode layer disposed above the high-k dielectric or the Ge material layer. The gate stack optimizes a shift of the flatband voltage or the threshold voltage to obtain high performance in p-FET devices.
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