Invention Grant
- Patent Title: Sensor module
- Patent Title (中): 传感器模块
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Application No.: US13206024Application Date: 2011-08-09
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Publication No.: US08748998B2Publication Date: 2014-06-10
- Inventor: Jens Frey , Heribert Weber , Eckhard Graf
- Applicant: Jens Frey , Heribert Weber , Eckhard Graf
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102010039057 20100809
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A sensor module includes a substrate system which has multiple substrates situated one on top of the other and connected in each case via a wafer bond connection. The substrate system includes at least one first sensor substrate and at least one second sensor substrate, the first sensor substrate having a first sensor structure and the second sensor substrate having a second sensor structure. The first and second sensor structures are designed for detecting different characteristics. At least the first sensor structure includes a micromechanical functional structure. Moreover, a method for manufacturing such a sensor module is disclosed.
Public/Granted literature
- US20120032283A1 SENSOR MODULE Public/Granted day:2012-02-09
Information query
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