Invention Grant
US08749006B2 Method and system for image sensor and lens on a silicon back plane wafer
有权
在硅背面晶片上的图像传感器和透镜的方法和系统
- Patent Title: Method and system for image sensor and lens on a silicon back plane wafer
- Patent Title (中): 在硅背面晶片上的图像传感器和透镜的方法和系统
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Application No.: US11952901Application Date: 2007-12-07
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Publication No.: US08749006B2Publication Date: 2014-06-10
- Inventor: Herb Huang , Mieno Fumitake
- Applicant: Herb Huang , Mieno Fumitake
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0232

Abstract:
An improved image sensor, e.g., CCD, CID, CMOS. The image sensor includes a substrate, e.g., silicon wafer. The sensor also includes a plurality of photo diode regions, where each of the photo diode regions is spatially disposed on the substrate. The sensor has an interlayer dielectric layer overlying the plurality of photo diode regions and a shielding layer formed overlying the interlayer dielectric layer. A silicon dioxide bearing material is overlying the shielding layer. A plurality of lens structures are formed on the silicon dioxide bearing material. The sensor also has a color filter layer overlying the lens structures and a plurality of second lens structures overlying the color filter layer according to a preferred embodiment.
Public/Granted literature
- US20080135897A1 METHOD AND SYSTEM FOR IMAGE SENSOR AND LENS ON A SILICON BACK PLANE WAFER Public/Granted day:2008-06-12
Information query
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