Invention Grant
- Patent Title: Acoustic wave device and method for manufacturing the same
- Patent Title (中): 声波装置及其制造方法
-
Application No.: US13398104Application Date: 2012-02-16
-
Publication No.: US08749320B2Publication Date: 2014-06-10
- Inventor: Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Masanori Ueda
- Applicant: Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Masanori Ueda
- Applicant Address: JP Tokyo
- Assignee: Taiyo Yuden Co., Ltd.
- Current Assignee: Taiyo Yuden Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2009-188531 20090817
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/15 ; H03H9/17 ; H03H9/13 ; H03H9/60 ; H03H9/58 ; H03H3/04
Abstract:
An acoustic wave device includes piezoelectric thin-film resonators, each of which includes: a substrate; a piezoelectric thin-film on the substrate; an lower electrode provided on a first surface of the piezoelectric film; an upper electrode provided on a second surface of the piezoelectric film opposite to the first surface; and a first addition film that is provided in a resonance portion in which the lower electrode and the upper electrode face each other through the piezoelectric film and is located between the piezoelectric thin-film and the upper electrode, the first addition film having a shape different from that of the resonance portion.
Public/Granted literature
- US20120146744A1 ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-06-14
Information query
IPC分类:
