Invention Grant
- Patent Title: System and method for safeguarding wafers and photomasks
- Patent Title (中): 用于保护晶片和光掩模的系统和方法
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Application No.: US13655842Application Date: 2012-10-19
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Publication No.: US08749388B2Publication Date: 2014-06-10
- Inventor: Paul D. Hand , George M. Harmuth , Gary T. Leonardi , Glenn M. Stefanski , Andrew P. Wyskida
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Parashos Kalaitzis
- Agent Michael A. Petrocelli
- Main IPC: G08B13/14
- IPC: G08B13/14

Abstract:
A system and a method for safeguarding wafers and photomasks. The system includes a container for storing an article, the article being a wafer or a photomask; a flashing unit for flashing light with a pre-determined light pattern; an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container; and a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit. The method includes providing a container having an anti-theft unit capable of performing an anti-theft function; storing an article in the container, the article being a wafer or a photomask; providing a flashing light with a pre-determined light pattern; detecting the pre-determined light pattern; and performing the anti-theft function by the anti-theft unit, in response to detecting the pre-determined light pattern.
Public/Granted literature
- US20130038451A1 SYSTEM AND METHOD FOR SAFEGUARDING WAFERS AND PHOTOMASKS Public/Granted day:2013-02-14
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