Invention Grant
- Patent Title: Stage apparatus and exposure apparatus
- Patent Title (中): 舞台装置和曝光装置
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Application No.: US13067363Application Date: 2011-05-26
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Publication No.: US08749755B2Publication Date: 2014-06-10
- Inventor: Hiroaki Takaiwa
- Applicant: Hiroaki Takaiwa
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/52 ; G03B27/58 ; G03F7/20
Abstract:
A stage apparatus includes: a moving stage, which moves along a movement plane; a first moving table, which holds a specimen while being able to move with respect to the moving stage; and a second moving table, which is provided on the moving stage and, when the first moving table has moved from a first position to a second position, is positioned at the first position.
Public/Granted literature
- US20110228240A1 Stage apparatus and exposure apparatus Public/Granted day:2011-09-22
Information query
