Invention Grant
US08751180B2 Methods and apparatus for pressure compensation in a mass flow controller 有权
质量流量控制器中压力补偿的方法和装置

Methods and apparatus for pressure compensation in a mass flow controller
Abstract:
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
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