Invention Grant
US08751180B2 Methods and apparatus for pressure compensation in a mass flow controller
有权
质量流量控制器中压力补偿的方法和装置
- Patent Title: Methods and apparatus for pressure compensation in a mass flow controller
- Patent Title (中): 质量流量控制器中压力补偿的方法和装置
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Application No.: US12233405Application Date: 2008-09-18
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Publication No.: US08751180B2Publication Date: 2014-06-10
- Inventor: John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
- Applicant: John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
- Applicant Address: US PA Hatfield
- Assignee: Brooks Instrument LLC
- Current Assignee: Brooks Instrument LLC
- Current Assignee Address: US PA Hatfield
- Agency: McGuireWoods LLP
- Main IPC: G01F1/50
- IPC: G01F1/50

Abstract:
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
Public/Granted literature
- US20090078055A1 METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER Public/Granted day:2009-03-26
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