Invention Grant
- Patent Title: Clean transfer robot
- Patent Title (中): 清洁传送机器人
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Application No.: US12103505Application Date: 2008-04-15
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Publication No.: US08757026B2Publication Date: 2014-06-24
- Inventor: David Barker , Robert T. LoBianco , Bhavesh Amin
- Applicant: David Barker , Robert T. LoBianco , Bhavesh Amin
- Applicant Address: DE Radolfzell
- Assignee: Dynamic Micro Systems, Semiconductor Equipment GmbH
- Current Assignee: Dynamic Micro Systems, Semiconductor Equipment GmbH
- Current Assignee Address: DE Radolfzell
- Agent Tue Nguyen
- Main IPC: B25J17/00
- IPC: B25J17/00

Abstract:
A robot with improved cleanliness for use in a clean environment is disclosed, having a uniform flow through the open interface between the clean environment and the interior of the robot housing, passing the particle generation area to an exhaust port, keeping the particles from the clean environment. The uniform flow reduces or eliminates the back flow, and further allows the scalability of the open interface to prevent particles generated from moving mechanisms within the robot housing to contaminate the clean environment. The uniform flow can be established by designing the flow dynamic, centering the exhaust port, or by restricting the flow along the elongated slot, for example, by uniformly restricting the flow along the elongated slot, or by implementing a restrictor along the elongated slot.
Public/Granted literature
- US20090255362A1 Clean transfer robot Public/Granted day:2009-10-15
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