Invention Grant
- Patent Title: Droplet discharge device
- Patent Title (中): 滴液放电装置
-
Application No.: US13963340Application Date: 2013-08-09
-
Publication No.: US08757772B2Publication Date: 2014-06-24
- Inventor: Hirofumi Sakai , Toru Shinohara
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2009-121696 20090520
- Main IPC: H05B33/10
- IPC: H05B33/10

Abstract:
A pattern film formation method includes: discharging liquid from at least one first nozzle toward a first pattern film formation region on a substrate; and discharging liquid from a plurality of second nozzles toward a second pattern film formation region that is narrower than the first pattern film formation region. A number of the second nozzles is greater than a number of the at least one first nozzle.
Public/Granted literature
- US20130323998A1 DROPLET DISCHARGE DEVICE Public/Granted day:2013-12-05
Information query