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US08757772B2 Droplet discharge device 有权
滴液放电装置

Droplet discharge device
Abstract:
A pattern film formation method includes: discharging liquid from at least one first nozzle toward a first pattern film formation region on a substrate; and discharging liquid from a plurality of second nozzles toward a second pattern film formation region that is narrower than the first pattern film formation region. A number of the second nozzles is greater than a number of the at least one first nozzle.
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