Invention Grant
US08757780B2 Corrugated membrane MEMS actuator 有权
波纹膜MEMS致动器

Corrugated membrane MEMS actuator
Abstract:
A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. A heater is associated with the second liquid chamber. A flexible corrugated membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber from each other.
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