Invention Grant
- Patent Title: Chemical-mechanical polishing pad conditioning system
- Patent Title (中): 化学机械抛光垫调节系统
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Application No.: US12754645Application Date: 2010-04-06
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Publication No.: US08758091B2Publication Date: 2014-06-24
- Inventor: Nannaji Saka , Thor Eusner , Jung-Hoon Chun
- Applicant: Nannaji Saka , Thor Eusner , Jung-Hoon Chun
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: MIT Technology Licensing Office
- Agent Sam Pasternack
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B21/18

Abstract:
Polishing pad conditioning system. The system includes a first rotatable platen supporting a polishing pad containing asperities having a radius of curvature. A second rotatable platen supports a disk of bulk material having holes therethrough, the second rotatable platen supported for translation as well as rotation. Means are provided for pushing the polishing pad and bulk material into contact at an interface during rotation and translation and means are provided for passing a slurry through the holes in the bulk material to the interface whereby the radius of curvature of the pad asperities is increased. Water may be delivered to the bulk material for cooling. A process for conditioning a polishing pad is also disclosed.
Public/Granted literature
- US20110244764A1 CHEMICAL-MECHANICAL POLISHING PAD CONDITIONING SYSTEM Public/Granted day:2011-10-06
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