Invention Grant
US08758506B2 Method for pulling a silicon single crystal 有权
拉硅单晶的方法

  • Patent Title: Method for pulling a silicon single crystal
  • Patent Title (中): 拉硅单晶的方法
  • Application No.: US12724590
    Application Date: 2010-03-16
  • Publication No.: US08758506B2
    Publication Date: 2014-06-24
  • Inventor: Markus Baer
  • Applicant: Markus Baer
  • Applicant Address: DE Munich
  • Assignee: Siltronic AG
  • Current Assignee: Siltronic AG
  • Current Assignee Address: DE Munich
  • Agency: Brooks Kushman P.C.
  • Priority: DE102009024473 20090610
  • Main IPC: C30B15/20
  • IPC: C30B15/20
Method for pulling a silicon single crystal
Abstract:
The invention relates to a method for pulling a silicon single crystal from a melt which is contained in a crucible, comprising immersion of a seed crystal into the melt; crystallization of the single crystal on the seed crystal by raising the seed crystal from the melt with a crystal pull speed; widening the diameter of the single crystal to a setpoint diameter in a conical section, comprising control of the crystal pull speed in such a way as to induce a curvature inversion of a growth front of the single crystal in the conical section.
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