Invention Grant
- Patent Title: Apparatus for manufacturing flat-panel display
-
Application No.: US12324297Application Date: 2008-11-26
-
Publication No.: US08758516B2Publication Date: 2014-06-24
- Inventor: Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
- Applicant: Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
- Applicant Address: KR Kyunggi-Do
- Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee Address: KR Kyunggi-Do
- Agency: Ked & Associates, LLP
- Priority: KR10-2004-0079416 20041006; KR10-2004-0083843 20041020; KR10-2004-0094230 20041117; KR10-2004-00102975 20041208; KR10-2004-0111693 20041224
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00
Abstract:
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
Public/Granted literature
- US20090084316A1 APPARATUS FOR MANUFACTURING FLAT-PANEL DISPLAY Public/Granted day:2009-04-02
Information query
IPC分类:
