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US08758537B2 Method for producing a multiplicity of semiconductor wafers by processing a single crystal 有权
通过处理单晶来生产多个半导体晶片的方法

Method for producing a multiplicity of semiconductor wafers by processing a single crystal
Abstract:
A method for producing a plurality of semiconductor wafers includes processing a single crystal. The single crystal is provided in a grown state and has a central longitudinal axis with an orientation that deviates from a sought orientation of a crystal lattice of the semiconductor wafers. A block is sliced from the single crystal along cutting planes perpendicular to a crystallographic axis corresponding to the sought orientation of the crystal lattice of the semiconductor wafers. A lateral surface of the block is ground around the crystallographic axis. A plurality of semiconductor wafers are then sliced from the ground block along cutting planes perpendicular to the crystallographic axis.
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