Invention Grant
US08758637B2 Apparatus and method of removing coating of line-shaped body using plasma
有权
使用等离子体去除线状体的涂层的装置和方法
- Patent Title: Apparatus and method of removing coating of line-shaped body using plasma
- Patent Title (中): 使用等离子体去除线状体的涂层的装置和方法
-
Application No.: US12242025Application Date: 2008-09-30
-
Publication No.: US08758637B2Publication Date: 2014-06-24
- Inventor: Takeshi Hirayama , Imei Shu , Sadayuki Toda , Hisashi Koaizawa , Masaru Hori
- Applicant: Takeshi Hirayama , Imei Shu , Sadayuki Toda , Hisashi Koaizawa , Masaru Hori
- Applicant Address: JP Tokyo JP Nissin-shi
- Assignee: The Furukawa Electric Co., Ltd.,Masaru Hori
- Current Assignee: The Furukawa Electric Co., Ltd.,Masaru Hori
- Current Assignee Address: JP Tokyo JP Nissin-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-092847 20060330
- Main IPC: B44C1/22
- IPC: B44C1/22
Abstract:
An apparatus of removing coatings of a line-shaped body of the invention includes a non-equilibrium atmospheric pressure plasma source with radicals controlled, having a plasma generating gas, a microwave, a micro gap; a line-shaped body holding portion for holding the line-shaped body within a range of 2 to 3 mm from an electrode to generate a plasma jet; and a moving stage for relatively moving the line-shaped body in the longitudinal direction thereof.
Public/Granted literature
- US20090223929A1 APPARATUS AND METHOD OF REMOVING COATING OF LINE-SHAPED BODY USING PLASMA Public/Granted day:2009-09-10
Information query
