Invention Grant
- Patent Title: Device and method for microstructured plasma treatment
- Patent Title (中): 微结构等离子体处理装置及方法
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Application No.: US12996824Application Date: 2009-06-09
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Publication No.: US08758697B2Publication Date: 2014-06-24
- Inventor: Michael Thomas , Claus-Peter Klages , Antje Zanker
- Applicant: Michael Thomas , Claus-Peter Klages , Antje Zanker
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Young Basile
- Priority: DE102008027461 20080609
- International Application: PCT/EP2009/004143 WO 20090609
- International Announcement: WO2009/149899 WO 20091217
- Main IPC: B01J19/08
- IPC: B01J19/08

Abstract:
The invention relates to a device for the microstructured plasma treatment of a film substrate, especially of a plastic film. Said device comprises a rotatably received cylindrical electrode the surface of which contains or consists of metal, especially chromium, the surface having microstructured depressions, a planar high-voltage electrode the surface of which has a shape complementary to that of the cylindrical electrode and can be arranged on a section of the surface of the cylindrical electrode in a substantially form-fit manner, a transport device for transporting the film substrate to be treated between the surface of the cylindrical electrode and the high-voltage electrode, and a device for feeding a process gas to the surface of the cylindrical electrode and to the interspace between the cylindrical electrode and the high-voltage electrode.
Public/Granted literature
- US20110259730A1 DEVICE AND METHOD FOR MICROSTRUCTURED PLASMA TREATMENT Public/Granted day:2011-10-27
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