Invention Grant
US08759175B2 Flash memory structure with enhanced capacitive coupling coefficient ratio (CCCR) and method for fabrication thereof 失效
具有增强的电容耦合系数比(CCCR)的闪存结构及其制造方法

Flash memory structure with enhanced capacitive coupling coefficient ratio (CCCR) and method for fabrication thereof
Abstract:
A flash memory structure having an enhanced capacitive coupling coefficient ratio (CCCR) may be fabricated in a self-aligned manner while using a semiconductor substrate that has an active region that is recessed within an aperture with respect to an isolation region that surrounds the active region. The flash memory structure includes a floating gate that does not rise above the isolation region, and that preferably consists of a single layer that has a U shape. The U shape facilitates the enhanced capacitive coupling coefficient ratio.
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