Invention Grant
US08759813B2 Light-emitting element having nitride semiconductor multiquantum barrier, and process for production thereof 有权
具有氮化物半导体多量壁垒的发光元件及其制造方法

  • Patent Title: Light-emitting element having nitride semiconductor multiquantum barrier, and process for production thereof
  • Patent Title (中): 具有氮化物半导体多量壁垒的发光元件及其制造方法
  • Application No.: US13580868
    Application Date: 2010-11-25
  • Publication No.: US08759813B2
    Publication Date: 2014-06-24
  • Inventor: Hideki Hirayama
  • Applicant: Hideki Hirayama
  • Applicant Address: JP Saitama
  • Assignee: RIKEN
  • Current Assignee: RIKEN
  • Current Assignee Address: JP Saitama
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2010-038912 20100224
  • International Application: PCT/JP2010/071524 WO 20101125
  • International Announcement: WO2011/104969 WO 20110901
  • Main IPC: H01L33/00
  • IPC: H01L33/00
Light-emitting element having nitride semiconductor multiquantum barrier, and process for production thereof
Abstract:
An Al0.95Ga0.05N:Mg (25 nm) single electron barrier can stop electrons having energy levels lower than the barrier height. Meanwhile, a 5-layer Al0.95Ga0.05N (4 nm)/Al0.77Ga0.23N (2 nm) MQB has quantum-mechanical effects so as to stop electrons having energy levels higher than the barrier height. Thus, electrons having energy levels higher than the barrier height can be blocked by making use of multiquantum MQB effects upon electrons. The present inventors found that the use of an MQB allows blocking of electrons having higher energy levels than those blocked using an SQB. In particular, for InAlGaN-based ultraviolet elements, AlGaN having the composition similar to that of AlN is used; however, it is difficult to realize a barrier having the barrier height exceeding that of AlN. Therefore, MQB effects are very important. Accordingly, it becomes possible to provide element technology for further improving deep UV light emission intensity using, as a light-emitting layer material, an AlGaInN-based material and, in particular, an AlGaN-based material.
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