Invention Grant
- Patent Title: Semiconductor structure and circuit including ordered arrangement of graphene nanoribbons, and methods of forming same
- Patent Title (中): 包括石墨烯纳米带的有序排列的半导体结构和电路及其形成方法
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Application No.: US13734499Application Date: 2013-01-04
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Publication No.: US08759824B2Publication Date: 2014-06-24
- Inventor: Christos D. Dimitrakopoulos , Alfred Grill , Timothy J. McArdle
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L51/30
- IPC: H01L51/30 ; H01L51/05 ; H01L27/088
Abstract:
A semiconductor structure including an ordered array of parallel graphene nanoribbons located on a surface of a semiconductor substrate is provided using a deterministically assembled parallel set of nanowires as an etch mask. The deterministically assembled parallel set of nanowires is formed across a gap present in a patterned graphene layer utilizing an electric field assisted assembly process. A semiconductor device, such as a field effect transistor, can be formed on the ordered array of parallel graphene nanoribbons.
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