Invention Grant
- Patent Title: Heterostructure for electronic power components, optoelectronic or photovoltaic components
- Patent Title (中): 电子元件的异质结构,光电或光电元件
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Application No.: US13513151Application Date: 2010-12-01
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Publication No.: US08759881B2Publication Date: 2014-06-24
- Inventor: Jean-Marc Bethoux , Fabrice Letertre , Chris Werkhoven , Ionut Radu , Oleg Kononchuck
- Applicant: Jean-Marc Bethoux , Fabrice Letertre , Chris Werkhoven , Ionut Radu , Oleg Kononchuck
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR0958547 20091201
- International Application: PCT/EP2010/068614 WO 20101201
- International Announcement: WO2011/067276 WO 20110609
- Main IPC: H01L31/06
- IPC: H01L31/06

Abstract:
A heterostructure that includes, successively, a support substrate of a material having an electrical resistivity of less than 10−3 ohm·cm and a thermal conductivity of greater than 100 W·m−1·K−1, a bonding layer, a first seed layer of a monocrystalline material of composition AlxInyGa(1-x-y)N, a second seed layer of a monocrystalline material of composition AlxInyGa(1-x-y)N, and an active layer of a monocrystalline material of composition AlxInyGa(1-x-y)N, and being present in a thickness of between 3 and 100 micrometers. The materials of the support substrate, the bonding layer and the first seed layer are refractory at a temperature of greater than 750° C., the active layer and second seed layer have a difference in lattice parameter of less than 0.005 Å, the active layer is crack-free, and the heterostructure has a specific contact resistance between the bonding layer and the first seed layer that is less than or equal to 0.1 ohm·cm2.
Public/Granted literature
- US20120241821A1 HETEROSTRUCTURE FOR ELECTRONIC POWER COMPONENTS, OPTOELECTRONIC OR PHOTOVOLTAIC COMPONENTS Public/Granted day:2012-09-27
Information query
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